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Semiconductor Industry

semiconductor industry


Applications in the Semiconductor Industry range from seals and components for process equipment used in the fabrication of integrated circuits or semiconductors.


SEMI (Semiconductor Equipment and Materials International) is a pseudoregulatory organisation offering some standards and testing procedures.

Semiconductor Industry Applications
SegmentsEnvironmentElastomersSealing Considerations
Crystal Growth (Pulling)25 to 200 C .001 - .01 torrFKMHigh thermal stability, chemical resistance, good vacuum performance
Thermal (LPCVD) Nitride, Oxide, ...23 to 300 C .5 - 1.0 torrFKM, VMQ, FFKMHigh thermal stability, chemical resistance, good vacuum performance
Track & Lithography25 to 100 C ambientFKM, EPDM FFKM (AU)Chemical resistance - solvents
Dry Etch25 to 200 C .1 - 1.0 torrFKM, FFKMChemical resistance, plasma resistance, thermal stability, non-black preferred
Wet Etch25 to 200 C ambientFKM, TFE, FFKMChemical resistance, no elemental contamination
Resist Stripping25 to 250 C .001 - .01 torrFVMQ, VMQ, FKM, FFKMChemical resistance - especially oxygen- rich and ozone environment
Cleaning25 to 200 C ambientFKM, FFKMAcid and solvent resistance, some high pH chemical resistance
Chemical Vapor Deposition (CVD)25 to 250 C .001 - .01 torrFKM, FFKMHigh vacuum performance, chemical resistance, thermal stability
Ion Implant25 to 200 C .0000001 torrNBR, FKMUltrahigh vacuum performance, low outgassing and permeation
Physical Vapor Deposition (PVD)25 to 200 C .000001 - .02 torrFKMUltrahigh vacuum performance, low outgassing and permeation
Chemical Mechanical25 to 80 C ambientEPDM, FFKMAbrasion resistance, high pH chemical resistance
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